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300mm analytical probe
station with coarse and fine wafer stage movement to provide
fast wafer movement as well as submicron resolution. The CheckMate
series of analytical probe stations reflects a very simple philosophy
of design ? make it strong, make it stable, make it accurate
and above all, make it easy to use.
CheckMate probe stations are available with the Signatone
Local Chamber option which provides protection from light
and RF during low current analysis, and protection from condensation
during cold probing applications. Signatone's TRIPAK Low Current
Analysis hardware allows the CheckMate Probe Stations to be
used to measure at currents as low as 1 femtoamp at temperatures
up to 300C. A wide range of Probing Accessories including
thermal chucks, lasers, dark boxes, programmable micropositioners
and vibration isolation solutions are available. CheckMate
stations are designed so that options such as the local chamber
and/or motorization can be field upgraded without removing
the probe station from the customer's facility. |
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The S-460 probe stations
will accommodate wafers up to 6" in diameter and can be
used for a wide range of applications including failure analysis,
design-debug, product engineering, and even low volume production
testing. The Signatone Solutions Windows software provides user
friendly wafer mapping and can interface to several instrument
control software packages to provide a truly automated test
system. Thermal chucks are available in a variety of temperature
ranges. Software/hardware features include programmable soft
Z motion, two point theta alignment, on-screen video, and over
100 user commands. The system will support programmable micropositioners,
and is available with a joystick/thumbwheel controller. The
S-460 is a versatile feature packed system for wafers up to
6". |
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The Signatone S-1160
is a rugged, economically priced, manual probe station that
can be fitted with either high powered optics for probing small
geometries or lower powered optics for probing bonding pads
and larger geometries. The S-1160 is available in a variety
of configurations for applications including RF probing, low
current (femtoamp range) probing, failure analysis, thermal
probing and other uses. The S-1160 will accept both magnetic
base and vacuum base micropositioners and is equipped with vacuum
ports for up to twelve vacuum base micropositioners. The S-1160
has a proven track record for reliability and functionality
at an attractive price. |
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H-100 series probe stations
include a three inch square device / substrate chuck and are
primarily designed for probing thick film devices such as ceramic
substrates, printed circuit boards and hybrid circuits. The
H-150 system, however, can be equipped with a four inch diameter
wafer chuck for probing wafers up to four inches in diameter.
H-100 series probe stations are available in three versions:
H-100, H-120 and H-150. The modular design provides a wide number
of options to suit a broad range of needs. All models include
an aluminum base casting, a device stage with four inches of
X-Y travel, a linear motion platen that can be raised and lowered
using either a crank or a lever, and a microscope tower for
mounting Stereozoom optics in a fixed position. A 4" x
4" microscope stage is optional. The platen will accept
up to six magnetic based micropositioners and a probe card adapter
for use with probe cards. Micropositioner electrical connections
are made through six pin jacks that correspond to color coded
banana plugs. |
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The TH76 Test Head Prober
is constructed around a vibration isolation table. The test
head is "docked" beneath a large plate (the vibration
table top) that floats on a cushion of compressed N2 or C.D.A.
A hole is milled into the plate to provide for probing into
the device. A micropositioner support platen is mounted on top
of the plate. The system has wheels so that it can be positioned
above the test head. An assortment of options are available
to enhance the probing capabilities of the system, including
CAP (Computer |
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