스핀코터(spin coater) 스핀에처 (spin etcher) &
스핀디벨로퍼(Spin Developer)
Diamond SAW / 시편절단기
폴리셔 (Polisher/
Polishing Machine)
Diamond Wire Saw
(다이아몬드 와이어 커터)
4 포인트 프로브(4 point probe :
표면저항측정기)
웨이퍼 현상장비/ 현상기/
에칭기/ Developer
반도체 및 pcb용 노광기 반도체-PCB 중고장비
양극 접합 장치 PR 스프레이코터 프로브스테이션
와이어본딩 테스터기 마이크로 컨택 프린터 UV 필름 경화 장비
진공탈포기 SEMICONDUCTOR-LCD
RD-PILOT-IN LINE LIST

칩 얼라이너
나노 미세 가공기 소형 정밀 프레스 vacuum Pump(버큠펌프)

 
 

300mm analytical probe station with coarse and fine wafer stage movement to provide fast wafer movement as well as submicron resolution. The CheckMate series of analytical probe stations reflects a very simple philosophy of design ? make it strong, make it stable, make it accurate and above all, make it easy to use.

CheckMate probe stations are available with the Signatone Local Chamber option which provides protection from light and RF during low current analysis, and protection from condensation during cold probing applications. Signatone's TRIPAK Low Current Analysis hardware allows the CheckMate Probe Stations to be used to measure at currents as low as 1 femtoamp at temperatures up to 300C. A wide range of Probing Accessories including thermal chucks, lasers, dark boxes, programmable micropositioners and vibration isolation solutions are available. CheckMate stations are designed so that options such as the local chamber and/or motorization can be field upgraded without removing the probe station from the customer's facility.


  The S-460 probe stations will accommodate wafers up to 6" in diameter and can be used for a wide range of applications including failure analysis, design-debug, product engineering, and even low volume production testing. The Signatone Solutions Windows software provides user friendly wafer mapping and can interface to several instrument control software packages to provide a truly automated test system. Thermal chucks are available in a variety of temperature ranges. Software/hardware features include programmable soft Z motion, two point theta alignment, on-screen video, and over 100 user commands. The system will support programmable micropositioners, and is available with a joystick/thumbwheel controller. The S-460 is a versatile feature packed system for wafers up to 6".

  The Signatone S-1160 is a rugged, economically priced, manual probe station that can be fitted with either high powered optics for probing small geometries or lower powered optics for probing bonding pads and larger geometries. The S-1160 is available in a variety of configurations for applications including RF probing, low current (femtoamp range) probing, failure analysis, thermal probing and other uses. The S-1160 will accept both magnetic base and vacuum base micropositioners and is equipped with vacuum ports for up to twelve vacuum base micropositioners. The S-1160 has a proven track record for reliability and functionality at an attractive price.

  H-100 series probe stations include a three inch square device / substrate chuck and are primarily designed for probing thick film devices such as ceramic substrates, printed circuit boards and hybrid circuits. The H-150 system, however, can be equipped with a four inch diameter wafer chuck for probing wafers up to four inches in diameter. H-100 series probe stations are available in three versions: H-100, H-120 and H-150. The modular design provides a wide number of options to suit a broad range of needs. All models include an aluminum base casting, a device stage with four inches of X-Y travel, a linear motion platen that can be raised and lowered using either a crank or a lever, and a microscope tower for mounting Stereozoom optics in a fixed position. A 4" x 4" microscope stage is optional. The platen will accept up to six magnetic based micropositioners and a probe card adapter for use with probe cards. Micropositioner electrical connections are made through six pin jacks that correspond to color coded banana plugs.

  The TH76 Test Head Prober is constructed around a vibration isolation table. The test head is "docked" beneath a large plate (the vibration table top) that floats on a cushion of compressed N2 or C.D.A. A hole is milled into the plate to provide for probing into the device. A micropositioner support platen is mounted on top of the plate. The system has wheels so that it can be positioned above the test head. An assortment of options are available to enhance the probing capabilities of the system, including CAP (Computer